Влияние природы полимерной матрицы, фоточувствительного генератора кислоты и физических факторов на литографические свойства химически усиленных фоторезистов
Диссертация
Данная работа выполнена в соответствии с тематическими планами НИИ Химии Нижегородского государственного университета им. Н. И. Лобачевского в рамках Аналитической ведомственной целевой программы «Развитие научного потенциала высшей школы» (per. номер 2.1.1/1473 и 2.1.1/12 613) и Федеральной целевой программы «Научные и научно-педагогические кадры инновационной России (2009;2013г.г.)» соглашение… Читать ещё >
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