Разработка и исследование технологии формирования наноструктур на основе нитридов элементов III группы
Диссертация
Для решения технологических и конструктивных вопросов создания новых приборов на основе наноразмерных структур применяется принципиально новый отечественный многофункциональный нанотехнологический комплекс «Нанофаб-100», имеющий в своем составе установку молекулярно-лучевой эпитаксии для выращивания гетероструктур на основе нитрида галлия, атомно-силовой микроскоп и колонну фокусированного… Читать ещё >
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