Исследование зарождения и роста нанокластеров при молекулярно–пучковой эпитаксии в системах SiC/Si, Ge/Si, InAs/GaAs методом компьютерного моделирования
Диссертация
Исходя из вышесказанного, представляется перспективным использовать богатые возможности компьютерного моделирования для совершенствования методов полупроводниковой технологии. Наиболее актуальным является построение физических моделей и алгоритмов моделирования технологических методик создания и исследования нанокластеров. Поэтому настоящая работа направлена на теоретическое исследование методами… Читать ещё >
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