Метод химического осаждения из растворов для создания активных и изолирующих диэлектрических слоев интегральных схем
Диссертация
Исследование влияния температуры обработки и состава пленкообразующих растворов на диэлектрическую проницаемость, зарядовые характеристики пленок проводилось путем анализа их вольт-фарадных и вольт-амперных характеристик. Для этого использовались измерительный комплекс CSM/Win System 1287−795 фирмы Materials Development Corporation (MDC), включающий пикоамперметр HP 4140 В (Hewlett-Packard… Читать ещё >
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