Плазмохимическое осаждение углеродных нано-и микроструктур для применения в электронике
Диссертация
Целью работы является: получение нанои микро структурных углеродных пленок с использованием методик плазмохимического осаждения и исследование их автоэмиссионных, электрохимических, а также оптических свойств. В рамках работы использован метод плазмохимического осаждения в разряде постоянного тока для синтеза пленок нанокристаллического графита, состоящих из нормально ориентированных к подложке… Читать ещё >
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