Взаимодействие вакуумного ультрафиолетового излучения с тонкими неорганическими пленками
Диссертация
Взаимодействие импульсного ВУФ излучения большой мощности приводит к фотопотемнению слоев, изменению фотостимулированной растворимости и абляции. Рисунок интегральной схемы может быть сформирован на поверхности и оксида индия, оксида титана и алмазоподобных пленках под воздействием вакуумного ультрафиолетового излучения без последующей химической обработки (режим абляции). Пороги абляции в данных… Читать ещё >
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