Численное моделирование роста поликристаллического кремния из хлоридных соединений
Диссертация
На настоящий момент отсутствуют адекватные модели сименс-процесса, обладающие достаточной предсказательной силой. Это вызвано огромной трудоемкостью расчетов и недостаточной разработанностью моделей роста, турбулентного течения в камере, причем, не только на техническом, но и на научном уровне. Поэтому предлагаемая работа обладает существенной научной новизной. В работе предложена модель роста… Читать ещё >
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