Особенности формирования InGaN/ (In, Al) GaN активной области для светоизлучающих приборов
Диссертация
Показано, что в структурах с InGaN/(Al, In) GaN активной областью присутствует три канала безызлучательной рекомбинации ответственных за различные механизмы транспорта к центрам безызлучательной рекомбинации (БР): захват на центры БР расположенные вблизи локализованных состояний, захват через состояния расположенные выше уровня протекания, и захват через состояния в матрице. Каждый из этих… Читать ещё >
Список литературы
- «Gallium Nitride 2003 technology status, applications and market forecasts» Report SC-25 Stretegies United, June 2003
- Marushka and Tietjen, Appl. Phys. Lett. 15 (1969) 327
- H. Amano, N. Sawaki, I. Akasaki and Y. Toyoda Metalorganic vapor phase epitaxial growth of a high quality GaN film using an A1N buffer layer Appl. Phys. Lett. 48 (1986) pp. 353−5
- S. Guha, J.M. DePyydt, M.A. Haase, J, Qiu, H, Cheng, «Degradation of II-VI based blue-green light emitters», Appl. Phys. Lett., 63 (1993) pp. 3107−3109
- S. Gundel, D. Albert, J. Nurnberger, W. Fashinger, Phys. Rew. В., 60 (1999) R16271
- M.A. Haase, J. Qiu, J.M. DePuydt, H. Cheng, «Blue-green laser diodes» Appl. Phys. Lett., 59 (1991) pp 1272−1274
- N. Nakayama, S. Itoh, T. Ohata, K. Nakano, H. Okuyama, H. Ozawa, M. Ishibasu, A. Ikeda, Y. Mori «Room temperature continuous operation of blue-green laser diodes», Electron. Lett., 29 (1993) pp. 1488−1489
- S. Itoh, A. Ishibashi, «ZnGgSSe based laser diodes», J. Crystal Growth, 150 (1995) pp.701−706
- W. Fashinger, J. Nurnberger, «Green II-VI light emitting diodes with long lifetime on InP substrate» Appl. Phys. Lett. 77, (2000) pp. 187−189
- Takashi Miyoshi, Shingo Masui, Takeshi Okada, Tomoya Yanamoto, Tokuya Kozaki, Shin-ichi Nagahama, and Takashi Mukai «510−515 nm InGaN-Based Green Laser Diodes on c-Plane GaN Substrate» Applied Physics Express 2 (2009) 62 201
- I. Akasaki, H. Amano, «Crystal growth and conductivity control of group III nitrides semiconductors and their applications to short wavelength light emitters», Jpn. J. Appl. Phys. Vol. 36 (1997 pp. 5393 5408)
- Bernardini F, Fiorentini V and YanderbiltD 1997 Phys. Rev. В 56 RIO 024
- Dimitrov R, Mitchell A, Wittmer L, Ambacher O, Stutzmann M, Hilsenbeck J and Rieger W 1999 Japan. J. Appl. Phys. 38 4962
- Ambacher О et al 1999 J. Appl. Phys. 85 3222
- Ambacher О 1998 J. Phys. D: Appl. Phys. 31 2653
- Shur M S, Bykhovski A D and Gaska R 1999 Mater. Res. Soc. Int. J. Nitr. Semicond. Res. S 41 G16
- I.Akasaki and H. Amano, «Crystal Growth and Conductivity Control of Group III Nitride Semiconductors and Their Application to Short Wavelength Light Emitters», Jpn. J. Appl. Phys. V 36 (1997), p. 5393−5408
- Bernardini F, Fiorentini V and Vanderbilt D 1997 Phys.Rev. B 56 R10 024
- Edgar J H (ed) 1994 Group III Nitrides (LondonrINSPEC)
- Tsubouchi К and Miskoshiba N 1985 IEEE Trans. SonicsUltrason. 32 634
- O’Clock G D and Duffy M T 1973 Appl. Phys. Lett. 23 55
- Littlejohn M A, Hauser J R and Glisson T H 1975 Appl. Phys. Lett. 26 625
- Bykhovski A D, Gelmont В L and Shur M S 1997 J. Appl. Phys. 81 6332
- Barker A S Jr and Ilegems M 1973 Phys. Rev. В 7 743
- Littlejohn M A, Hauser J R and Glisson T H 1975 Appl. Phys. Lett. 26 625
- Bougrov V., Levinshtein M.E., Rumyantsev S.L., Zubrilov A., in Properties of Advanced SemiconductorMaterials GaN, A1N, InN, BN, SiC, SiGe. Eds. Levinshtein M.E., Rumyantsev S.L., Shur M.S., John Wiley & Sons, Inc., New York, 2001, 1−30.
- Rheinlander, A., Neumann, H., Phys. Status Solidi (b) 64 (1974) K123
- Bloom, S., Harbeke G., Meier E., Ortenburger I.B., Phys. Stat. Solidi 66 (1974), 161−168
- Leszczynski, M., H. Teisseyre, T. Suski, I. Grzegory, M. Bockowski, J. Jun, S. Porowski, K. Pakula, J.M. Baranowski, C.T. Foxon, T.S. Cheng, Lattice parameters of gallium nitride, Appl. Phys. Lett. 69(1) (1996), 73−75
- Xu, Y. N, Ching W.Y., Electronic, optical, and structural properties of some wurtzite crystals. Phys Rev. В 48, 7 (1993), 4335−4351
- Suzuki, M., Uenoyama Т., Strain effect on electronic and optical properties of GaN/AlGaN quantum-well lasers. J. Appl. Phys. 80, 12 (1996), 6868−6874
- Lambrecht, W.R., Segall В., Anomalous band-gap behavior and phase stability of c-BN-diamond alloys. Phys. Rev. В 47 (1993), 9289−9296
- Xu, Y-N., Ching W.Y., Electronic, optical, and structural properties of some wurtzite crystals. Phys. Rev. В 48 (1993), 4335−4350
- О Ambacher «Growth and applications of Group Ill-nitrides» J. Phys. D: Appl. Phys. 31 (1998) 2653−2710
- S.F. Chichibu, T. Azuhata, T. Sota, T. Mukai, S. Nakamura, J. of Appl’Phys. 88,5153,(2000)
- Ambacher, Andreas Hangleiter «Optical properties of nitride heterostructures» Phys. Stat. Sol. © 0, No. 6, 1816−1834 (2003)
- T. Wang, J. Bai, S. Sakai, and J. К. Ho, «Investigation of the emission mechanism in InGaN/GaN-based light-emitting diodes», T. Wang, J. Bai, S. Sakai, and J. К. Ho
- N. Nakayama, S. Itoh, T. Ohata, K. Nakano, H. Okuyama, PI. Ozawa, M. Ishibasu, A. Ikeda, Y. Mori «Room temperature continuous operation of blue-green laser diodes», Electron. Lett., 29 (1993) pp. 1488−1489
- S. Nakamura, «Status of GaN LEDs and Lasers for Solid- State Lighting and Displays,» OIDA Solid-State Lighting Workshop (Albuquerque, May 30, 2002)
- H Xing, S Keller, Y-FWu, L McCarthy, I P Smorchkova, D Buttari, R Coffie, D S Green, G Parish, S Heikman, L Shen, N Zhang, J J Xu, В P Keller, S P DenBaars and U К Mishra, «Gallium nitride based transistors» J. Phys.: Condens. Matter 13 (2001)7139−7157
- M-A. di. Forte-Poisson et Al., «MOCVD growth of group III nitrides for high power, high frequency applications» Phys. Stat. Sol. © 2, No. 3, 2005, pp. 947−955.
- S. K. Davidsson, J. F. Faith, X. Y. Liu, H. Zirath, and T. G. Andersson «Effect of A1N nucleation layer on the structural properties of bulk GaN grown on sapphire by molecular-beam epitaxy» J. Appl. Phys. 98, 16 109 (2005)
- F. Semond et Al., «Molecular Beam Epitaxy of group-ПГ nitrides on silicon substrates: growth properties and device applications», Phys. Stat. Sol. (a), No 2, 2001, 188, pp. 501−510,i
- Y. B. Kwon, J. H. Je, P. Ruterana and G. Nouet «On the origin of a-type threading dislocations in GaN layers» J. Vac. Sci. Technol. A 23, 1588 (2005)z50. L.M. Belyaev, RUBIN I SAPFIR, Nauka Publishers, Moscow, 1974
- Josh Abell and T. D. Moustakas «The role of dislocations as nonradiative recombination centers in InGaN quantum wells» Appl. Phys. Lett: 92, 91 901 (2008)
- S. Nakamura, W. Weeks, M.D. Bremser, K. Ailey, E. Carlson, W. Perry, R.F. Davis, «GaN Growth using GaN buffer layer», Appl. Phys. Lett. 67 (1995) 401−403
- Hino T, Tomiya S, Miyajima T, Yanashima K, Hashimoto S and Ikeda M 2000 Appl. Phys. Lett. 76 3421
- S.Yu.Karpov and Yu.N.Makarov, «Dislocation Effect on Light Emission Efficiency in Gallium Nitride», Appl.Phys.Lett. 81, 4721 (2002)
- E. F. Schubert, Light-emitting Diodes (Cambridge University Press, New York, 2003).
- D. A. Steigerwald, J. C. Bhat, D. C. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin, and S. L. Rudaz, IEEE J. Sel. Top. Quantum Electron. 8, 310 (2002).
- N.N. Ledentsov Compound Semiconductors, 5 (9) November/December 1999
- S. Nakamura, «Status of GaN LEDs and Lasers for Solid- State Lighting and Displays,» OIDA Solid-State Lighting Workshop (Albuquerque, May 30, 2002)
- K. P. O’Donnell, R. W. Martin, and P. G. Middleton «Origin'of Luminescence from InGaN Diodes», Phys. Rew. Lett. 82 (1) 1999, p 237
- S. Yu. Karpov, N. I. Podolskaya, I. A. Zhmakin, A. I. Zhmakin, «Statistical model of ternary group-Ill nitrides», Phys. Rew. В 70, 235 203 (2004)
- M.K. Behbehani, E.L. Piner, S.X. Liu, N.A. Ei-marsy, S.M. Bedair, «Phase separation and ofdering coexisting in InGaN grown by metal-organic chemical vapor deposition», Appl: Phys. Lett., 75 (15) 1999 p 2202
- S.F. Chichibu, T. Azuhata, T. Sota, T. Mukai, S. Nakamura, J. of Appl Phys. 88,5153,(2000)
- R. P. O. Donnell, S. Pereira, R.W. Martin, P.R. Edwards, M.J. Tobin, J.F.W. Mass elm ans. Phys. Status Solidi A, 195, 532, (2003)
- M. Vening, D.J. Dunstan, K.P. Homewood. Phys. Rev. B, 48, 4 (1993)
- S. Sanguinetti, M. Henini, M. Grassi Alessi, M. Capizzi, P. Frigeri, S. Franchi. Phys. Rev. B, 60, 114(1999).
- Koichi Tachibana, Takao Someya, Satomi Ishida, Yasuhiko Arakawa «Selective growth of InGaN quantum dot structures and their microphotoluminescence at room temperature»
- Appl. Phys. Lett., 76 (22), 2000-pp:3212−3214 72, 73. www.cree.com, Annual Report 2008−2009.
- S.Yu.Karpov, R.A.Talalaev, E.V.Yakovlev, Yu.N.Makarov. Mater.Res.Soc.Symp.Proc., 639 (2001) G3.18.
- UrsulaM.E.Christmas, A.D.Andreev and D.A.Faux, «Calculation of electric field and optical transitions in InGaN/GaN Quantum wells» JOURNAL OF APPLIED PHYSICS 98,73 522 (2005)
- R. J. Radtke, U. Waghmare, H. Ehrenreich, and’C. H. Grein, «Theoretical performance of wurtzite and zincblende InGaN/GaN quantum well lasers», Appl. Phys. Lett. 73, 2087 (1998)
- Han-Youl Ryu, Hyun-Sung Kim, and Jong-In Shim, «Rate equation analysis of efficiency droop in InGaN light-emitting diodes», Appl. Phys. Lett. 95, 81 114 (2009)
- A. R. Beattie and P. T. Landsberg, «Auger Effect in Semiconductors», Proc. R. Soc. Lond. A., vol. 249, no. 1256/16 -29, Jan. 1959.
- A. R. Beattie and P. T. Landsberg, «One-Dimensional Overlap Functions and Their Application to Auger Recombination in Semiconductors», Proc. R. Soc. Lond. A., vol. 258, no. 1295/486−495, Nov. 1960.
- P. T. Landsberg, «On detailed balance between Auger recombination and impact ionization in semiconductors», Proc. R. Soc. Lond. A., vol. 331, no. 1584/103−108, Nov. 1972.
- P. T. Landsberg and M. J. Adams, «Theory of donor-acceptor radiative and Auger recombination in simple semiconductors», Proc. R. Soc.1.nd. A., vol. 334, no. 1599/523−539, Sep. 1973.
- Omit Ozgiir, Hadis Morkoc, H. Liu, X. Li- and X. Ni «GaN-based Light-Emitting Diodcs: Efficiency at High Injection Levels» Proc. IEEE (2009) (special issue)
- Kris T. Delaney, Patrick Rinke and Chris G. Van de Walle «Auger recombination rates in nitrides from first principles», APPLIED PHYSICS LETTERS 94, 19 1109(2009)
- J. Hader, J. V. Moloney, and S. W. Koch, «Density-activated defect recombination as a possible explanation for the efficiency droop in GaN-based diodes», Appl. Phys. Lett. 96, 221 106 (2010)'
- XingLi, HuiyongLiu, X. Ni, UmitOzgur, HadisMorko?, «Effect of carriers pillover and Auger recombination on the efficiency droop in InGaN-based blue LEDs», Superlattices and Microstructures 47 (2010) 118−122
- I. V. Rozhansky and D. A. Zakheim, «Analysis of processes limiting quantum efficiency of AlGalnN LEDs at high pumping» Phys. Stat. Sol. (a) 204, 1, 227−230 (2007).
- N. F. Gardner, a G. O. Muller, Y. C. Shen, G. Chen, S. Watanabe, «Blue-emitting InGaN-GaN double-heterostructure light-emitting diodes reaching maximum quantum efficiency above 200 A/cm2″ APL 91, 24 3506(2007)
- A.A. Арендаренко, И. Г. Ермошин, Ю. Н. Свешников, И. Н. Цыпленков. Тез. докл. 6-й Всеросс. конф, &bdquo-Нитриды галлия, индия и алюминия» (СПб, 2008) с. 123."lifetime and optical absorption of InxGai. xN/GaN quantum structures", PhRevB.61.10 994 .i
- Junqiao Wu «When group-Ill nitrides go infrared: New properties and perspectives», JOURNAL OF APPLIED PHYSICS 106,11 101 (2009)
- L.V. Asryan, R.A. Suris, «Inhomogeneous line broadening and the threshold current density of a semiconductor quantum dot laser „Semicond. Sci. Technol. 11, 554(1996)
- D.S. Sizov, E.E. Zavarin, N.N. Ledentsov, V.V. Lundin, Yu.G. Musihin, V.S. Sizov, R.A. Suris, A.F. Tsatsul’nikov, 'A nonequilibrium population of the carriers in structures with deep quantum InGaN dots' Semiconductors, 41 (5) 2007 pp 595 608
- Matthias Peter, Ansgar Laubsch, Werner Bergbauer, Tobias Meyer, Matthias Sabathil, Johannes Baur, and Berthold Hahn „New developments in green LEDs“ P hys. Status Solidi A 206, No. 6, 1125−1129 (2009)
- Aurelien Davida and Michael J. Grundmann „Droop in InGaN light-emitting diodes: A differential carrier lifetime analysis“, APPLIED PHYSICS LETTERS 96, 103 504 (2010)
- Y. C. Shen, a G. O. Mueller, S. Watanabe, N. F. Gardner, A. Munkholm, and M. R. Krames „Auger recombination in InGaN measured by photoluminescence“, APPLIED PHYSICS LETTERS 91, 141 101 (2007)
- В. K. Riedly, „Kinetic of recombination in quantum wells“ PHYSICAL REVIEW В VOLUME 41, NUMBER 17,15 JUNE 1990−1
- Yong-Hoon Cho, T. J. Schmidt, S. Bidnyk, G. H. Gainer, J. J. Song, S. Keller, U. K. Mishra, and S. P. DenBaars, „Linear and nonlinear optical properties of InxGal AxNOGaN heterostructures“, PHYS. REV. B, VOL. 61, N 11 (2000).
- HREM Research, http://www.hremresearch.com.
- Н.В.Крыжановская, В. В. Лундин, А. Е. Николаев, А. Ф. Цацулышков, А. В. Сахаров, М. М. Павлов, Н. А. Черкашин, M.J.Hytch, Г. А. Вальковский,
- М.А.Яговкина, С. О. Усов, „Исследования оптических и структурных свойств короткопериодных сверхрешеток InGaN/GaN для активной1 области светоизлучающих диодов“ ФТП, 2010, том 44, выпуск 6
- Лундин В.В., Заварин Е. Е., Сизов Д1С.“ Влияние газа-носителя на процесс газотранспортной эпитаксии нитрида галлия из метал л органических соединений „Письма в ЖТФ. 2005. Т. 31. В: 7. С. 52−56.
- Yakovlev E.V., Talalaev R.A., Kondratyev A.V., Segal A.S., Lobanova A.V., Lundin W.V., Zavarin E.E., Sinitsyn M.A., Tsatsulnikov A.F., Nikolaev A.E. “ Growth conditions and surface morphology of A1N MOVPE» J. Cryst. Growth. 2008. V. 310. P. 4862.
- Ландау, Л. Д., Лифшиц, Е. М. Квантовая механика (нерслятивистская- теория): МС: Наука, (1974), 752 с. («Теоретическая физика», том III).
- К. A. Bulashevich, S. Yu. Karpov and R. A. Suris, «Quantum-confined Stark effect in group-Ill nitride quantum wells», 12th Int. Symp. «Nanostructures: Physics and Technology» St Petersburg, Russia, June 21−25, (2004)
- Martin F. Schubert, Jiuru Xu, Qi Dai, Frank W. Mont, Jong Kyu Kim, and E. Fred Schubert, «On resonant optical excitation and carrier escape in GalnN/GaN quantum, wells» APPLIED PHYSICS LETTERS 94, 81 114, (2009).
- Smith, B.T., P.M. Boyle, J.J. Dongarra, B.S. Garbow, Y. Ikebe, V.C. Klema, and C.B. Moler (1976), Matrix Eigensystem Routines EISPACK Guide, Springer-Verlag, New York.
- Hanson, Richard J., R. Lehoucq, J. Stolle, and A. Belmonte (1990), Improved performance of certain matrix eigenvalue computations for the IMSL/MATH Library, IMSL Technical Report 9007, IMSL, Houston.
- Ursula M. E. Christmas, A. D. Andreev and D. A. Faux, Calculation of electric field and optical transitions in InGaN/GaN quantum wells, JOURNAL OF APPLIED PHYSICS 98, 73 522 (2005)